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Thinning of N-face GaN (000(1)over bar) samples by inductively coupled plasma etching and chemomecha
  • ISSN号：0734-2101
  • 期刊名称：Journal of Vacuum Science & Technology A
  • 时间：0
  • 页码：252-260
  • 语言：英文
  • 相关项目：基于介观光学结构的GaN基新型发光器件
作者： Kang, X. N.|Rizzi, F.|Martin, R. W.|Dawson, M. D.|Watson, I. M.|Zhang, G. Y.|Gu, E.|
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基于介观光学结构的GaN基新型发光器件
期刊论文 22
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