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中文摘要：
利用激光剥离技术(LLO)和晶片键合技术将GaN基发光二极管(LED)薄膜与蓝宝石衬底分离并转移到Si衬底上,高分辨X射线衍射(HRXRD)和阴极荧光谱(CL)结果表明激光剥离过程没有影响GaN量子阱的结构和光学性质,GaN和InGaN/GaN多量子阱的发光峰都呈现红移,这都来源于去除蓝宝石后薄膜中应力的释放.采用金属In和Pd的合金化键合过程解决了GaN材料与Si衬底的结合问题,结合逐个芯片剥离和键合的方式实现了GaN大面积均匀转移.成功研制了激光剥离垂直电极结构的GaN基LED,L-I测试特性表明器件的热饱和电流和出光功率都有很大的提高.
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