中文摘要：

近几十年来，超导单光子探测技术被越来越广泛的应用于量子保密通信与线性光量子计算等重要领域中．其中，基于超导共面波导谐振器的单光子技术以其结构简单，高探测效率及可分辨光子数目等特性吸引了人们越来越多的关注．随着科研工作者对样品制备工艺的不断改进，对选用超导薄膜材料的不断优化，以及对相关背景理论的深入研究，共面波导谐振器单光子探测技术在近几年中取得了巨大的突破．本文将从共面波导谐振器单光子探测器的工作原理，相关理论研究，样品参数设计等方面出发，结合本实验室近期测试得到的实验结果，对共面波导谐振器单光子探测技术的发展近况进行简要的综述．

英文摘要：

Since the last decades, superconducting single-photon technology has been extensively used in the quantum security communication and the linear-optic quantum computing fields. Especially, the device based on the coplanar waveguide resonator has attracted substantial interests due to its evident advantages, including the relatively simple structure, the sufficiently high detection efficiency, and the photon-resolving capability, etc. With the profound investigation in optimizing the depositing methods and the material selections, as well as the the development of the relevant theories, the technology of single photon detection based on the eoplanar waveguide resonator has obtained a breakthrough. In this review paper we begin from the basic principle of the coplanar waveguide detector, then interpret the relevant theory and some design details of the devices. Finally, based on some of the recent experimental results measured with the low-temperature devices in our lab, we give a brief perspective on the future development of the superconducting coplanar waveguide single photon detectors.