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中文摘要：
实验研究了在不同气源条件下高频正弦介质阻挡放电法产生臭氧时电压、体积流量、相对湿度的变化对臭氧体积分数的影响．实验结果表明，当气源分别为空气和氧气时，臭氧体积分数随气体体积流量的变化呈不同的变化趋势，为空气源时臭氧体积分数随气体体积流量的增大先升高后降低，而为氧气源时臭氧体积分数不断下降．气源为氧气时，实验中当电压为较低电压3064V，体积流量为30L／h时，臭氧体积分数高达55000×10^-6，从而即产生了高体积分数的臭氧又保证了整个系统的安全，降低了成本．
英文摘要：
Experiments were carried out to study the effects of voltage, volume flow rate and relative humidity of air or oxygen on the volume fraction of ozone generated by high frequency dielectric barrier discharge. The results showed that with the increase of volume flow rate, ozone volume fraction increased to the highest level and then decreased in both wet air and dry air, while it kept decreasing in oxygen. Ozone volume fraction reached to 0. 055 at a low voltage of 3 046 V and oxygen volume flow rate of 30 L/h. Such a high volume fraction of ozone ensures the system safety and reduces the system cost.
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