利用脉冲激光在Si表面刻蚀微米级四方柱,通过多靶磁控溅射镀膜机在其表面上沉积Al—Ti双层金属膜,然后利用激光诱导金属涂层形变,在四方柱的硅基底上形成定向微渠道,通过测量水与定向微渠道表面的接触角(前进角和后退角)研究各向异性表面浸润性特性。结果表明,在硅基底上构建的Al—Ti金属膜各向异性表面表现出水滴的前进角和后退角都较大,各向异性结构对其浸润性有明显的影响。因此,利用激光可以在固体表面制备各向异性表面,控制表面的润湿行为。
Firstly,the micron square-posted silicon surface was prepared by pulse laser ablation. Al-Ti bilayers metal films were deposited on the sample by a magnetron plasma sputtering plant. And then,the directional micrometer scale channels on the micron square--posted silicon surface were obtained by laser inducing Al-Ti coatings. The wettability of anisotropic surface was discussed by the measure of water contact angle (advancing angle and receding angle) between the droplet and the directional channels. The results indicate the wettability of the Si-based surface with oriented Al-Ti metal microchannels shows anisotropic anisotropy. Thus,we may fabricate the controllable wettability of the surface with anisotropic microstructure by pulse laser.