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声表面波气敏传感器敏感薄膜厚度的研究
  • 期刊名称：压电与声光, February, 2009.
  • 时间：0
  • 分类：TN01[电子电信—物理电子学] TP212[自动化与计算机技术—控制科学与工程;自动化与计算机技术—检测技术与自动化装置]
  • 作者机构：[1]南开大学现代光学研究所,天津300071, [2]天津工业大学理学院,天津300160, [3]安徽大学计算智能与信号处理教育部重点实验室,安徽合肥230039
  • 相关基金：基金项目：国家自然科学基金资助项目（60572018）;天津市科技发展计划科技攻关基金资助项目（05YFGPGX04900）
  • 相关项目：新型多通道声表面波气体传感器研究
关键词： 声表面波, 敏感薄膜, 最佳薄膜厚度, surface acoustic wave, sensitive layer, optimal layer thickness
中文摘要：

理论上研究了声表面波气敏传感器敏感薄膜厚度对系统灵敏度的影响。分析了气体浓度、敏感薄膜厚度、敏感薄膜密度对系统灵敏度的共同影响。提出了最佳薄膜厚度的概念，并给出了相应的关系式。

英文摘要：

Influence of sensitive layer of surface acoustic wave sensor on the sensitivity of system was researched theoretically. Total influence of gas concentration, thickness and density of sensitive layer to the sensitivity of system was also analyzed. Then the idea of optimization of the layer thickness was proposed and the corresponding formulas were presented.

同期刊论文项目
新型多通道声表面波气体传感器研究
期刊论文 34 会议论文 19
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