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中文摘要：
为了适应紫外探测技术的迅速发展，满足对紫外光源和紫外探测器校准的需求，建立了紫外一真空紫外光谱辐照度校准装置。装置由标准光源（氘灯）、标准探测器（增强型硅光二极管探测器）、紫外单色仪、真空仓等组成。装置采用双标准比对的方式对被测仪器和器件进行校准。即用标准光源和标准探测器分别对被检紫外光源和被检探测器进行量值传递。校准的光谱范围为110～400nm。对探测器校准的不确定度最大为12％（k=2），对光源的校准不确定度最大为20％（k=2）。
英文摘要：
In order to adapt the fast development of ultraviolet detection and fitting the requirements for the calibration of ultraviolet optical sources and ultraviolet detectors, a facility for calibration of ultraviolet and vacuum ultraviolet spectral irradiance was set up. The facility was composed of standard optical source （deuterium lamp）, standard detector （intensive silicon diode）, ultraviolet monochromator, vacuum chamber and so on. The double standards and compared method were adopted in the facility to calibrate the equipments. As well as the value of the standard detector and source were transferred to the detector and the source which were calibrated calibrating the detector is 12%（k=2）, and Spectral range is 110-400 nm.The maximum uncertainty for for the optical source is 20%（k=2）.
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