中文摘要：

气流量和水分压是影响添加DEA的三氟乙酸-金属有机沉积（TFA-MOD）法制备YBa2Cu3O7-δ（YBCO）膜织构及超导性能的两个重要参数.本文详细的研究了这两个参数对YBCO膜织构及超导性能的影响.在保证其他参数条件不变的情况下,气流量和水分压的变化范围分别为0.5-2.0L/min和2.3-7.3%.气流量在0.5L/min到2.0L/min变化范围内均可获得优良的工艺过程;同时水分压在3.7-5.3%的变化范围内（对应适当的生长速率）时可观察到织构良好,表面致密,超导性能优良的YBCO膜.较低或较高的水分压会导致a轴取向的显著增多.最终,本文将气流量和水分压两个工艺参数对YBCO膜的交叉影响绘制成相图.结果表明,过高或过低的生长速率会导致更多的a轴取向成核.

英文摘要：

The influence of significant conversion parameters, gas flow and water pressure on the YBa2 Cua O7-δ （YBCO） films derived through trifluoroacetates-metal organic deposition （TFA-MOD） precursors with addition of diethanolamine （DEA） has been investigated. The gas flow and water pressure vary from 0. 5 L/rain to 2.0 L/min, and 2. 3% to 7.3%, respectively, while the other process parameters remain constant. It is revealed that a relatively broad range of gas flow from 0. 5 L/min to 2. 0 L/min is available to achieve a successful processing. Pure c-axis orientation, dense surface and excellent superconducting performance are observed in the YBCO films obtained at a in- termediate water pressure of 3.7% to 5.3% corresponding to medium growth rate, while a lower or higher water pressure gives rise to a-axis orientation obviously. As a consequence, the cross-linking of processing parameters between gas flow and water pressure is realized with a phase diagram. Implying that too low or too high the growth rate will leads to more a-axis nucleation.