中文摘要：

基于化学溶液法制备了尖晶石结构氧化物锰钴镍氧Mn1.56Co0.96Ni0.48O4（MCNO）薄膜材料,研究了其电学性质及红外器件的探测性能,包括器件的响应率,时间常数和探测率.制作了厚度为8μm的MCNO薄膜及红外热敏探测器件,测量了材料的阻值-温度曲线.制作了基于半球形锗透镜的浸没式MCNO薄膜探测器,具有时间常数较小（~18 ms）,响应率高（~4.4×103V/W）和探测率高（~5×108cm·Hz0.5/W）的优点.

英文摘要：

Spinel oxide Mn-Co-Ni-O （MCNO） thin films were prepared by using a chemical solution deposition method （CSD）. The electrical property and device performance based on MCNO thin films were investigated, including the re- sponsivity （Rv）, noise spectra and the detectivity （D ＊ ）. MCNO thin film with a thickness of 8 μm was prepared and their sheet resistance versus temperature curves are measured. The optical immersed MCNO infrared detector based on Germanium lens was fabricated, and it possesses the advantages of relatively small time constant （ ~ 18 ms）, high re- sponsivity （ -4.4 × 103 V/W） and high detectivity （ -5 × 10s cm · Hz0.5/W）.