中文摘要：

直流等离子体离子注入是一种新的离子注入手段。本文基于particle-in-cell模型使用MATLAB软件对长轴零件直流等离子体离子注入进行数值仿真研究,主要考察工件到等离子体边界栅网距离、工件半径、工件电势以及离子种类对于离子注入范围和角度的影响。结果表明,工件到栅网的距离对注入结果的影响较大,距离增加导致离子注入相对范围缩小,注入倾斜角度减小。工件尺寸也会影响注入结果,当工件半径较小时,离子注入相对范围较大,注入角度波动也较大;也讨论了离子种类、工件电压不会对离子运动轨迹、注入位置和注入角度造成影响。

英文摘要：

Surface modification of a long shaft by DC ion implantation was mathematically modeled on the basis of particle-in-cell scheme,and numerically simulated with software package Matlab. The influence of the ion implantation conditions,especially the shaft-grid distance,shaft＇s radius and bias voltage,and ion species,on the implanted area and implantation angle was evaluated. The results show that the shaft-grid distance and shaft＇s radius have a major impact on the implantation dynamics. For instance,as the distance increases,both the implanted area and implantation angle decrease; and a reduced shaft radius results in an increase of implantation area and a stronger fluctuation of implantation angle. Besides,the shaft＇s bias voltage and ion species weakly affect the ion trajectory,implantation angle and positions.