中文摘要：

波导多层存储器（WMS）的原理是以波导缺陷形式记录数据，通过缺陷的光散射效应读出数据，并利用波导对光的空间约束作用抑制层问串扰。介绍了3种数据记录方式：激光直写法、光刻法和热压法，并给出了它们的实验结果。激光直写法是将激光聚焦于聚合物表面，通过热效应改变焦点处介质的性质，形成的缺陷就是记录的数据；光刻法是通过光刻步骤在光敏胶层记录数据点；热压法类似于CD-ROM的制作方法，是利用金属模板在聚合物表面或者由聚合层覆盖的基片上压印信息。给出了基于不同记录方式的WMS结构，观察了它们的数据散射效应，并对不同的数据记录方法进行了比较和讨论。

英文摘要：

In optical waveguide multilayer storage（WMS）, the data are recorded in the form of waveguide defects and are read out by using the light scatter effect of the waveguide defects. This paper mainly introduces three kinds of data recording methods including laser directing, photolithography and hot embossing, and gives their experiment results. In the laser direct writing method, a laser beam is focused on the recording layer directly. The laser alters the medium property locally at the focus point, which acts as the defect in the waveguide structure. The second method resorts to the processes of photolithography to record pits on the photoresist layer. Hot embossing is a technique where pattern definition is achieved on polymers or polymer coated substrates under pressure with metal moulds at elevated temperature. The different data writing approaches based on their different results are compared and discussed as well.