中文摘要：

硅基单电子晶体管是一种极具潜力的新型量子器件。大多数硅基单电子晶体管的制备方法可以很好地与主流的CMOS工艺兼容。介绍了硅基单电子晶体管一些典型的具体制备工艺和方法以及该领域近年来的研究热点。

英文摘要：

Silicon single-electron transistors are a new-style dot device of great potentials. Most of the fabrication methods of silicon single-electron transistors can be perfectly compatible with the Si complementary metal-oxide-semiconductor （CMOS） technology. Some typical fabrication methods of silicon single-electron transistors （SET） were introduced and some attractive issues in the past few years were summarized.