Modeling of a micro-cantilevered piezo-actuator considering the buffer layer and electrodes
- ISSN号:0960-1317
- 期刊名称:Journal of Micromechanics and Microengineering
- 时间:0
- 页码:-
- 相关项目:低维铁电材料的制备、力学表征及其微器件应用
作者:
Peng, Shutao|Peng, Ke|Zheng, Xuejun|Sun, Jing|Zhang, Yong|Zhou, Liang|Zhao, Jihe|Deng, Shuifeng|Cao, Mingfang|Xiong, Wei|