中文摘要：

利用等离子体增强化学气相沉积（PECVD）技术,在单晶硅基底表面制备含氢类富勒烯碳基薄膜.采用FEI Tecnai F30型高分辨透射电镜（HRTEM）和LABRAM HR 800型拉曼光谱仪对薄膜的结构进行表征;利用摩擦磨损试验机、奥林巴斯STM6测量显微镜和X射线光电子能谱仪（XPS）分析比较薄膜在干摩擦与离子液体1-乙基-3-甲基咪唑四氟硼酸盐（L-B102）润滑条件下的表界面特性.实验结果表明：所制备的碳基薄膜具有典型的类富勒烯结构;在离子液体作为润滑剂条件下,含氢类富勒烯碳基薄膜在低频率摩擦时表现出减摩性能;在高频率摩擦中表现出优异的抗磨性能,磨损寿命显著提高.其作用机理可能是离子液体在摩擦过程中作为约束液体,当液体与固体表面接触时,由于分子或原子相互吸引的作用,产生物理吸附边界润滑膜,有效地起到减摩抗磨作用.

英文摘要：

Hydrogenated fullerene-like carbon film was prepared on monocrystal silicon substrate by means of plasma enhanced chemical vapor deposition.The microstructure of the film was characterized with high-resolution transmission electron microscopy（HRTEM）and LABRAM HR 800-type Raman spectroscope.The film surface behavior under the condition of dry sliding and lubrication with ionic liquid（L-B102）was analyzed and compared by friction-abrasion testing machine（FMT-R4000）,Olympus STM6 measuring microscope,and X-ray photoelectron spectrometer（XPS）.The experimental result indicated that the fabricated film would have typical fullerene-like structure and exhibit friction reduction ability at low frequency and with ionic liquid as lubricant.Its wear resistance at high frequency would be excellent and its wear life would be improved remarkably.The mechanism of such result may be as follows：the ionic liquid as a restraining liquid in the process of friction would generate a physical adsorptive boundary lubrication film due to mutual affinity of the molecules or atoms when surface contact of liquid to solid takes place,so that effectively functioning its friction-reducing and anti-wear effect.