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Deep-etched high-spatial-frequency metal-based sandwiched grating for reflective dual-function beam
  • ISSN号：0030-3992
  • 期刊名称：Optics and Laser Technology
  • 时间：2013.7
  • 页码：81-85
  • 相关项目：高功率消相干均束化的新型光刻用固态激光源研究
作者： Bo Wang|Li Chen|Liang Lei|Jinyun Zhou|
同期刊论文项目
高功率消相干均束化的新型光刻用固态激光源研究
期刊论文 27
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