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中文摘要：
分析图像相关识别中的纯相位匹配滤波器的模式识别方法，利用该滤波器的相关识别位图计算算法，及其所具有的相干峰尖锐特性与高度旋转敏感特性，分别求取得光刻套刻过程中，掩模板和硅片基板对准标记的相对平移坐标与旋转坐标的精密量化驱动值。将此算法的实施单元建立在一套成型的大面积投影光刻系统中，使得该系统的对位精度与对位效率显著地提高。
英文摘要：
A pattern recognition named phase-only matched filtering is presented to realize high precision alignment in projecting lithography. The method achieves the alignment with the characteristic direction of templates and silicon substrate using the coherent peak rotating sensitive feature in the filter. Meanwhile the relative translation distance of templates and silicon substrate is obtained in recognition algorithms. Such an alignment system is assembled in our mature projection lithography machine, and the experimental data obtained prove the higher accuracy and efficiency compared with conventional algorithms.
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