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芯片级平面环形微腔的表面优化处理研究
  • 所属机构名称：中北大学
  • 会议名称：中国兵工学会第十四届测试技术年会暨中国高等教育学会第二届仪器科学及测控技术年会
  • 成果类型：会议
  • 会场：延吉
  • 相关项目：基于高Q值环形微腔介观力－光耦合效应的芯片级高灵敏度传感器研究
作者： 严英占|王少辉|闫树斌|张文栋|姜国庆|熊继军|
同会议论文项目
基于高Q值环形微腔介观力－光耦合效应的芯片级高灵敏度传感器研究
期刊论文 16 会议论文 19 专利 6
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