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Analysis of Tunneling Piezoresistive Effect of P-type Polysilicon Nanofilms
  • 所属机构名称：哈尔滨工业大学
  • 会议名称：1st International Conference of Chinese-Society-of-Micro-Nano-Technology
  • 成果类型：会议
  • 会场：Beijing, PEOPLES R CHINA
  • 相关项目：多晶硅纳米膜压阻式压力传感器研究
作者： Lu, Xuebin|Chen, Weiping|liu, Xiaowei|Chuai, Rongyan|Huo, Mingxue|Shi, Changzhi|
同会议论文项目
多晶硅纳米膜压阻式压力传感器研究
期刊论文 18 会议论文 6 专利 1
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