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Piezoresistive Properties of Heavily Doped P-type Polysilicon Films
  • 所属机构名称：哈尔滨工业大学
  • 会议名称：4th IEEE International Conference of Nano/Micro Engineered and Molecular Systems
  • 成果类型：会议
  • 会场：Shenzhen, PEOPLES R CHINA
  • 相关项目：多晶硅纳米膜压阻式压力传感器研究
作者： Chuai, Rongyan|Chen, Weiping|Shi, Changzhi|Huo, Mingxue|Liu, Xiaowei|Lu, Xuebin|
同会议论文项目
多晶硅纳米膜压阻式压力传感器研究
期刊论文 18 会议论文 6 专利 1
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Analysis of Tunneling Piezoresistive Effect of P-type Polysilicon Nanofilms