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Layout Decomposition Co-Optimization for Hybrid E-Beam and Multiple Patterning Lithography
  • 所属机构名称：复旦大学
  • 会议名称：ACM/IEEE Asia and South Pacific Design Automation Conference (ASP-DAC), 2015
  • 时间：2015.1.19
  • 成果类型：会议
  • 相关项目：成品率驱动的纳米尺度集成电路设计方法学研究
同会议论文项目
成品率驱动的纳米尺度集成电路设计方法学研究
期刊论文 30 会议论文 16 获奖 4
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