位置：成果数据库 > 会议 > 会议详情页
Metal transfer assisted nanolithography on rigid and flexible substrates
  • 所属机构名称：中国科学院光电技术研究所
  • 会议名称：52nd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication
  • 成果类型：会议
  • 会场：Portland, OR
  • 相关项目：微电子学
作者： Guo, L. Jay|Kang, Myung-Gyu|
同会议论文项目
微电子学
期刊论文 5 会议论文 5
同项目会议论文
Nanoimprint technology and its applications
Easy duplication of stamps using UV-cured fluoro-silsesquioxane for nanoimprint lithography
Roll-to-Roll Nanoimprint Lithography on Flexible Plastic Substrate
Fabrication of high aspect ratio Si nanogratings with smooth sidewalls for a deep UV-blocking partic