中文摘要：

以K2CO3、Li2CO3和Nb2O5为原料,采用固相反应法制备了铌酸钾锂陶瓷;以此为靶材,采用脉冲激光沉积技术在石英玻璃上沉积了铌酸钾锂薄膜,系统研究了沉积温度对铌酸钾锂薄膜组成与结构的影响。利用X射线衍射、拉曼光谱等测试手段对薄膜的结构进行表征,通过紫外-可见光分光光度计测试薄膜的光学透过率。结果表明：所制备的铌酸钾锂靶材结构致密;在衬底温度为700℃、氧分压10 Pa的条件下可以制备纯的铌酸钾锂薄膜,所得到的多晶薄膜呈（310）取向;光学性能测试显示所制备的铌酸钾锂薄膜在可见光范围内的光学透过率为90%左右。

英文摘要：

Potassium lithium niobate （KLN： K3Li2Nb5O15 ） thin films have been deposited on quartz glass by pulsed laser deposition （PLD） technique using a stoichiometric KLN target, which was prepared by solid reaction with K2CO3, Li2CO3, and Nb2O5 powders as starting materials. X-ray diffraction （XRD） and Raman studies have revealed that tetragonal tungsten-bronze-type structure of KLN films with （310） preferred orientation could be achieved at the substrate temperature of 700℃ and the oxygen partial pressure of 10 Pa. The average transmittance of as-deposited thin films in the visible range was nearly 90%.