中文摘要：

锌的高透明、传导性的薄电影做了锡氧化物(ZTO ) 被磁控管用 12 wt% ZnO 劈啪作响与 88 wt% SnO2 陶器的目标做了的无线电频率(RF ) 在石英底层上扔。ZTO 电影的结构、电、光的表演上的底层温度的效果被学习了。X 光检查衍射(XRD ) 结果证明 ZTO 电影与比较喜欢的取向拥有四角形的金红石结构(101 ) 。这些电影的表面形态学和粗糙被原子力量显微镜(AFM ) 调查。电的特征(包括的搬运人集中，霍尔活动性和抵抗力) 和光发射度被大厅测试者和 UVVIS 分别地学习。1.144 的最高级的搬运人集中？？? 骄ю骄ю？

英文摘要：

High transparent and conductive thin films of zinc doped tin oxide （ZTO） were deposited on quartz substrates by the radio-frequency （RF） magnetron sputtering using a 12 wt% ZnO doped with 88 wt% SnO2 ceramic target.The effect of substrate temperature on the structural,electrical and optical performances of ZTO films has been studied.X-ray diffraction （XRD） results show that ZTO films possess tetragonal rutile structure with the preferred orientation of （101）.The surface morphology and roughness of the films was investigated by the atomic force microscope （AFM）.The electrical characteristic （including carrier concentration,Hall mobility and resistivity） and optical transmittance were studied by the Hall tester and UV- VIS,respectively.The highest carrier concentration of -1.144×1020 cm-3 and the Hall mobility of 7.018 cm2（V ·sec）-1 for the film with an average transmittance of about 80.0% in the visible region and the lowest resistivity of 1.116×10-2 Ω·cm were obtained when the ZTO films deposited at 250 oC.