中文摘要：

为了能实现跨尺度纳米定位操作,研制了一个基于粘滑驱动机理的纳米定位平台。采用柔性铰链的驱动机构,在对其在垂直方向上和驱动方向上的刚度进行分析的基础上,进行尺寸优化,从而减少定位平台在垂直方向产生耦合运动。致动器采用叠堆型压电陶瓷,实验分析发现压电陶瓷驱动器在有预紧力作用下,实际位移输出小于标称位移,当预紧力越大时,压电陶瓷的实际输出位移越小。在导向方面,采用双列交叉滚柱导轨,实现了载物台的多样化设计,从而提高了定位平台的适用性。同时结合LuGre摩擦模型对定位平台进行了动力学分析,优化其结构设计。单自由度粘滑驱动纳米定位平台的最大尺寸为28 mm×34 mm×12 mm,具有10 nm的分辨率、0.021 mm/s的速度和10 mm的行程。

英文摘要：

To realize the cross-scale nano-positioning manipulation,a nanopositioner based on the stick-slip principle was designed.Based on the analysis of the stiffness in the vertical and driving directions,the flexure hinges were adopted to optimize the dimensions and avoid the coupling motion in the direction which is vertical to the driving direction.The stacked piezoelectric ceramic was chosen for the actuator.The experiment analysis results show that when the preload is applied to the piezoelectric ceramic actuator,the real displacement of the piezoelectric actuator is smaller than the nominated displacement.The larger the preload is,the smaller the real displacement of the piezoelectric actuator is.The double row cross-roller guide was used,and the diversified design of the sample table was obtained,thus the applicability of the nanopositioner in many fields was enhanced.In addition the kinetics analysis of the nanopositioner with the LuGre friction model was made to optimize the structure design of the nanopositioner.Finally,the single freedom degree nanopositioner based on the stick-slip principle with the maximum size of 28 mm×34 mm×12 mm was designed.The nanopositioner is of 10 nm resolution,0.021 mm/s velocity and10 mm stroke.