中文摘要：

透明非晶氧化物薄膜晶体管（TAOS-TFT）相对于硅基TFT具有均一性好、迁移率高、兼容低温柔性基板等优点,能够广泛用于平板有源显示领域特别是有源矩阵有机发光二极管显示（AMOLED）的驱动背板。溶胶-凝胶法制备薄膜晶体管不需要高真空的环境,成本低、工艺简单,化合物成分易于控制,能够均匀定量地实现分子水平的掺杂,满足新技术研发的需求,近年来引起了广泛关注,研究主要集中在寻找合适有源层和绝缘层材料、研究薄膜成分、制备工艺对器件性能的影响,并获得与传统真空工艺可比拟的器件性能。针对柔性显示器件成为未来显示发展的主流技术之一,全溶液法制备以及基于柔性基板制备TFT也取得了较好的进展,为未来显示行业提供了可靠的低成本发展方向。但所制备的TFT器件仍然存在制备温度相对较高,偏压稳定性相对较差的问题。总结了该领域内目前研究热点及取得的进展。

英文摘要：

Transparent oxide thin film transistor has attracted much attention due to advantages of a high field effect mobility,excellent uniformity,and the compatibility with flexible substrate compared to conventional amorphous and polycrystalline silicon thin film transistors,which can be widely used in active flat panel display areas,especially organic light emitting diode display driver back plane.Solution processed thin film transistor does not require high vacuum environment,low cost,simple process,easy to control compound ingredients,al-so can achieve uniform molecular level doped quantitative,meet the demand for new technology research and development.The research concentrated in the film composition and process temperature on device performance. The all solution processed fabrication and low temperature preparation based on flexible substrate have also made good progress,which provide a reliable and low cost technology for the future flat display industry.How-ever,it still has relative high fabrication temperature and poor stability.This paper summarizes the remarkable work,research direction and progress in the field.