中文摘要：

依据阵列波导光栅（AWG）的传输理论，分析了工艺公差对硅基聚合物AWG波分复用器性能的影响，分析结果表明，工艺公差将引起AWG传输光谱的漂移，并使串扰增大，为了实现AWG器件正常的解复用功能，我们对AWG工艺公差的累积和补偿效应进行了讨论。

英文摘要：

The effects of manufacturing tolerances on transmission characteristics are analyzed for a 33×33 polymer arrayed waveguide grating （AWG） multiplexer via transmission theory. Simulated results show that manufacturing tolerances result in a shift of the transmission spectrum and in the increase of the crosstalk compared with theoretical device. The accumulation and compensation of manufacturing tolerances are investigated. In order to realize the normal demultiplexing for a fabricated AWG device, some allowed manufacturing, tolerances are discussed.