中文摘要：

报道了一种在工艺制作过程中减小聚合物阵列波导光栅（AWG）器件光谱漂移的有效方法，通过调整波导芯层的旋涂转速来控制芯层的厚度进而可以有效地减小器件的光谱漂移。AWG器件的设计中心波长为1550．918nm，制作的AWG器件的实际中心波长为1550．85nm，即利用该方法使传输光谱的漂移减小到0．07nm，远远小于波长间隔0．8nm，改善了器件的解复用功能。

英文摘要：

An efficient technique is reported to decrease the spectral shift of the polymer arrayed waveguide grating （AWG）. By regulating the spin-coating rate to control the polymer core thickenss,the spectral shift of the device can be reduced efficiently. The designed value of the central wavelength is 1550. 918 nm,and the measured central wavelength is 1550.85 nm. So,by using the presented technique in the fabrication of the device,the spectral shift is reduced to 0.07 nm,which is much less than the wavelength spacing of 0.8 nm. It is indicated that the dimultiplexing of the device is improved.