中文摘要：

本文基于阵列波导光栅（AWG）的传输理论,利用含氟聚合物（PFS-co-GMA）共聚物材料,对17×17信道光谱响应平坦化AWG波分复用器进行了参数优化.由于在聚合物阵列波导光栅器件的制备过程中,选用了反应离子刻蚀（RIE）工艺和蒸汽回溶技术,形成的梯形截面波导芯,使AWG传输的光产生相位移,导致传输光谱移动,引起串扰的变化.为此我们运用等效能流分析方法对矩形截面AWG器件的参数进一步修正,通过优化设计弥补了工艺的不足.实验测试结果表明：AWG中心波长约为1550.865 nm,3-dB带宽约为0.478 nm,中心波长插入损耗约为10.5dB,串扰约为-21.5dB.

英文摘要：

In terms of the transmission theory of the arrayed waveguide grating,by using Fluoropolymer（PFS-co-GMA）,the parameter optimization is performed for a 17×17 AWG multiplexer.In the fabrication of the polymeric arrayed waveguide grating （AWG） device,the cores of the channels and the arrayed waveguides exhibit trapezoid cross-sections instead of originally designed rectangular ones after the reactive ion etching and the stean-redissolution,causes the phaeshift of the light propagating in the AWG,results in the shift of the transmission spectrum,and bring about the variation of the crosstalk.In this paper,by employing the equivalent energy flow method,the AWG parameters have been fixed,and a polymer AWG multiplexer with flat have been designed and fabricated.Measured results show that the central wavelength is 1550.865nm,3-dB bandwidth is about 0.478 nm,insertion loss is 10.5 dB,crosstalk is about-21.5dB.