以平面环形微腔结构为核心器件,基于量子力学的隧道效应和“参量振荡不稳定”效应,结合理论计算及ANSYS和Beamprop仿真,设计出基于环形微腔结构的超高灵敏度位移传感器,特别是在1.55μm的谐振波下,对所设计的位移传感器进行了ANSYS力学仿真、Beamprop传输特性仿真以及输出特性数值模拟,论证了位移传感器的可行性,并为以后的实验奠定了基础。
Describe a novel displacement sensor with high sensitivity based on the tunneling effect and the parametric instability using the planar ring micro-cavity structure as the core component. Design the structure according to theoretical calculation, ANSYS simulation and Beamprop simulation. Especially under the 1.55μm incident wave, simulate and analyze the output characteristic values of this structure which prove the feasibility of such sensor, and have laid the foundation for later experiments.