中文摘要：

采用MEMS工艺制备平面微盘腔，再通过二氧化碳激光熔融其表面形成为环状结构，通过三维形貌微系统分析仪、原子力显微镜分别测试了其外部尺寸和表面粗糙度，实验结果表明，锥形光纤近场耦合测得微腔品质因素为4．8×10^5，耦合效率在95％以上，因此激光回流微的方式在得到了新的结构的同时保证了光腔的性能。

英文摘要：

MEMS technology was used to fabricate microdisk cavity, and CO2 laser was applied to reflow the surface of microdisk, which formed mierotoroid shape in order to improve the surface of the optical microcaviy. Atomic-forcemicroscopy and TMS（topography measurement system）were used for testing the feature of the cavity. Quality factor of the microtoroidal cavity was tested by taper evanescent-field coupling, and the average value can be up to 4.8×10^5 with the coupling efficiency of about 95%. The result showed that process of laser reflow not only obtained the new shape but also ensured excellent optical performance in planar microtoroid cavity.