中文摘要：

该文对开关电容式闭环微加速度计的系统稳定性进行了深入研究。提出了可通用于该类微传感系统的动态特性分析方法,并具体研究了传感器品质因子、力反馈延迟、电路补偿单元的参数多种因素对系统稳定性的影响。基于0.35 mm CMOS工艺实现了一款接口电路芯片实例,实验结果表明,充分的电路补偿设计对于保证系统稳定性十分关键,实际的系统稳定边界与理论分析结果也较为吻合,从而证明了理论分析方法的正确性。

英文摘要：

This paper presents in-depth research into the system stability of switched-capacitor closed-loop micro- accelerometers. Universal method of dynamic characteristic analysis on such type of micro-accelerometer is imposed. Critical influencing factors of system stability are investigated, including the quality factor of the sensor, the force feedback delay, and the parameters of the electronic compensator. The theory is further confirmed with the design and fabrication of a prototype interface circuit in a commercial 0.35 μm CMOS process. Experiment results show that elaborately-designed electronic compensator is very significant for ensuring system stability, while the measured stability border of the system matches well with the theoretic result.