中文摘要：

铁电阵列在红外探测器、非挥发性存储器中具有重要应用。随着大面积、微格点铁电阵列制备技术的发展，评价亚微米、甚至纳米级微小格点的铁电特性对于铁电器件的设计和制造具有重要意义。本研究将铁电仪和扫描探针显微镜相连，在扫描探针显微镜的AFM模式下，采用带有导电涂层的探针，通过扫描获得铁电阵列的三维像。据此图像，可以把探针定位于特定的微小格点上，由铁电仪通过AFM探针提供电压，并经探针悬臂梁将测试信号反馈给铁电仪，在无顶电极的情况下就可以获得微小铁电格点的电滞回线。

英文摘要：

Ferroelectric arrays have promising applications in the infrared detectors and non-volatile ferroelectric memories. With the improvement of preparation method for large area and micro-dot ferroelectric arrays, as for the design and fabrication of ferroelectric device, it is significant to characterize the ferroelectricity of submicron even nano-size ferroelectrie dots. In this study, we connected the scanning probe microscopy with the TF Analyzer 2000, under the AFM mode of the scanning probe microscopy, 3D image of the ferroelectric arrays was obtained by the conducting coated probe. Based on the 3D image, the probe can be located on the specific micro-dot. The polarized voltage applied on the dots was supplied by the TF Analyzer 2000, Then the test signal was feeded back to TF Analyzer 2000 through the cantilever, and thus obtaining the hysteresis loop of the micro-dot array in the absence of top electrode.