中文摘要：

采用溶胶-凝胶法，以三甲基氯硅烷、氢氟硅酸和水为先驱体，在玻璃基片上用提拉法制备出一种含有-CF3强疏水性基团的氟硅烷薄膜。通过红外光谱和扫描电镜对薄膜结构和表面形貌进行了表征和观察。并用接触角测定仪三甲基氯硅烷和氢氟硅酸在不同摩尔配比下薄膜疏水性能。结果表明该薄膜具有高度交联的不规则球状表面结构。当三甲基氯硅烷和氢氟硅酸的摩尔比为2．5：1时，薄膜具有超疏水性，对水滴的表面接触角可达156°。

英文摘要：

The fluoroalkylsilane film was synthesized by using trimethylchlorosilane, fluosilicic acid and water as the precursors. The film was prepared by sol-gel process on glass substrates. The fluoroalkylsilane film contains -CF3 group. The surface is rough and existing an interlace and irregular microstructure. As the molar ratio of trimethylchlorosilane to fluosilicic acid is 2. 5 ： 1. The contact area between the fluoroalkylsilane film and liquid is small with the effect of the -CF3 group. So there is a minimum surface tension of fluoroalkylsilane. The contact angle for water in the fluoroalkylsilane film was 156°, which is super water-repellent.