中文摘要：

采用溶胶-凝胶与喷雾热解相结合的方法，在大面积浮法玻璃基板上制备出了SnO2：Sb＋F透明导电薄膜，研究了F／Sn比例、基板温度与SnO2薄膜的结构、形貌、光电性能的关系。实验结果表明：在溶胶的Sn：Sb：F比例为1：0．04：0.5和基板温度550℃的条件下，制备的SnO2：Sb＋F薄膜具有最佳的导电性能及较高的透光率，薄膜方阻达25Ω／□，电阻率为7．5×10^-4Ω·cm，平均可见光透过率为77．4％，辐射率e=0．208，表现出了较好的低辐射性。

英文摘要：

A transparent conducting thin film of SnO2：Sb ＋ F was prepared by Sol - Gel joint spray pyrolysis method on large area float glass. The relationship between F/Sn ratio, substrate temperature and structure, morphology of SnO2：Sb ＋ F film as well as its photoelectric performances were studied. Results show that, at the substrate temperature of 550℃ and Sn： Sb： F = 1 ：0.04：0. 5 in solution, the optimal conductivity and well transmittance of the film can be obtained. In this case, SnO2：Sb ＋ F film coated on the float glass with 25Ω/□ of the square resistance, 7.5 ×10^-4 Ω· cm of the resistivity , 77.4% of average transmittance at the range of visible light, as well as 0. 208 of emissivity was obtained which shows well low emission.