中文摘要：

在微铣削加工过程中，实现位置的快速和精确定位是保证微细切削加工质量的前提条件。为了验证微铣削系统的高精度和高加减速特性，对直线电机进行了动态性能测试。针对直线电机驱动器在位置、速度及转矩等控制模式的不同特征，分别在3种模式下进行了在线伺服参数调整和PID优化，建立伺服参数调整模型，提高机床动态响应性能。采用正交实验的方法，分别在微动和宏动情况下，对比分析了3种控制模式对微铣削系统的不同影响，根据其不同的动态响应能力，选择适合微铣削机床直线电机伺服系统的控制模式。位置模式下，直线电机驱动平台实现了在给定加速度30m／s^2，速度200mm／s下，定位误差在1μ之内。

英文摘要：

Fast positioning and pinpointing is important for the processing quality of micro-milling machining processing. To verify the high precision and high acceleration and deceleration characteristics of the micro-milling system, the dynamic performance of its linear motor was tested. By considering the different characteristics of the servo driver under the position, velocity and torque control modes, servo parameters were adjusted and the PID values were optimized respectively. Then, a servo parameters-adjusting system, which was designed to improve the dynamic performance of the machine, was established. Under the condition of macro and micro moving, the different effects of three control modes on the micro-milling system of were comparatively analyzed by means of orthogonal test. A control mode with better dynamic performance was chosen properly for the linear motor servo system of the micro-milling machine. Given the acceleration of 30 m/s^2 and speed of 200 mm/s, the positioning error is limited within 1μ under position control mode.