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A kinematic model describing particle movement near a surface as effected by Brownian motion and el
  • ISSN号：1006-9321
  • 期刊名称：中国科学 技术科学(英文版)
  • 时间：2014.10.17
  • 页码：2144-2152
  • 相关项目：基于电化学的化学机械平坦化终点检测方法及实验研究
作者： Dewen Zhao|Tongqing Wang|Jie Cheng|Xinchun Lu|
同期刊论文项目
基于电化学的化学机械平坦化终点检测方法及实验研究
期刊论文 14 会议论文 2
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