中文摘要：

利用多弧离子镀技术在316L不锈钢和单晶硅上沉积CrCN薄膜,通过X射线衍射仪（XRD）、扫描电镜（SEM）、X射线光电子能谱仪（XPS）、纳米压痕仪、273A电化学工作站和多功能摩擦磨损试验机等对316L不锈钢及CrCN薄膜的微观结构、力学性能、耐腐蚀性能和摩擦学性能进行表征.结果表明：在316L不锈钢上沉积CrCN薄膜后,硬度从4 GPa提高到22 GPa,H/E和H3/E2分别从0.022和0.002 GPa提高到0.071和0.11 GPa;阳极腐蚀电位从-0.21 V上升到-0.19 V;在大气,去离子水,海水环境下的摩擦系数及磨损率均显著降低,表现出较优异的综合性能.

英文摘要：

CrCN coating is deposited on 316 L stainless steel and single crystal silicon by Multi-Arc ion plating technique. Microstructures, mechanical performance, corrosion resistance and tribological properties in ambient air, distilled water and seawater are systematically investigated by XRD, XPS, SEM, nano-indentation and ballon-disc tribol-meter. The results show that hardness of CrCN coating, deposited on 316 L stainless steel,increases from 4 GPa to 22 GPa, H/E and H3/E2 increased from 0.022 and 0.002 GPa to 0.071 and 0.11 GPa,relatively. The anode corrosion potential increases from-2.1 V to-1.9 V, the friction coefficient and wear ratio in ambient air, distilled water and seawater can all be significantly reduced. In other words, the coated 316 L stainless steel shows a better comprehensive performance than uncoated one.