中文摘要：

利用多弧离子镀技术,在乙炔和氮气环境下,设定不同沉积温度（150℃、250℃、350℃、450℃）,在316L不锈钢及单晶硅片上沉积Cr CN涂层,通过XRD、XPS、SEM、纳米压痕仪和UMT-3多功能摩擦磨损试验机等涂层的微观结构、力学性能和摩擦学性能进行表征.结果表明：随着沉积温度的升高,Cr CN涂层的硬度和模量呈现出递增的趋势,在沉积温度为450℃时达到最高,分别为24 GPa和354 GPa;摩擦系数和磨损率则呈现出先递减后递增的趋势,在沉积温度为350℃时达到最低,摩擦系数在大气和水环境下分别为0.38和0.23,磨损率在大气和水环境下则分别为1.717 1×10-6mm3/N·m和9.529 7×10-7mm3/N·m.同时,涂层在水环境中的摩擦系数和磨损率均低于大气环境中,说明水分子在摩擦过程中起到了较好的润滑作用.

英文摘要：

Cr CN coatings with different deposition temperatures（150 ℃, 250 ℃, 350 ℃, 450 ℃）are deposited on 316 L stainless steel and single crystal silicon by Multi-Arc ion plating technique. Microstructures,mechanical performance and tribological performances in ambient air and water are systematically investigated by XRD, XPS, SEM, nano-indentation and ball-on-disc tribol-meter. The results show that the hardness and modulus increase with the increasing of deposition temperature and reach the climax with deposition temperature at 450 ℃ and the maximum value at about 24 Gpa and 354 Gpa, respectively. Both the friction coefficients and wear rates of Cr CN coatings in ambient air and water tent to decrease after increasing first and reach the bottom with deposition temperature at 350 ℃. The friction coefficient in ambient air and water are about 0.38 and 0.23, the maximum value of wear rate in ambient air and water are about 1.717 1 ×10-6mm3/Nom and 9.529 7×10-7mm3/Nom, respectively. Meanwhile, the friction coefficients and wear rates of Cr CN coatings in water are lower than that in ambient air, which is attributed to the good lubrication of water during the friction.