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Fabrication and characterization of Ce: YIG thin film
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  • 分类:TQ172.622[化学工程—水泥工业;化学工程—硅酸盐工业] O484.43[理学—固体物理;理学—物理]
  • 作者机构:[1]School of Mechanical Engineering, Xi' an Jiaotong University, Xi' an 710049, China, [2]State Key Laboratoryfor Manufacturing Systems Engineering, Xi' an Jiaotong University, Xi' an 710049, China
  • 相关基金:Foundation item: National Natural Science Foundation of China (NSFC) (No. 51175418); Program for New Cen- tury Excellent Talents in University (No. 93JXDW02000006); Natural Science Foundation of Shaanxi Province (No. 2011JQ7004); Fundamental Research Funds for the Central Universities of Xi'an Jiaotong University (No. 2011jdgz09; No. 2011jdhz23; No. xjj2011068); Fund of the State Key Laboratory of Digital Manufacturing Equipment & Technology (No. DMETKF2012009)
中文摘要:

Yttrium iron garnet (YIG) is widely used for microwave ferrite devices,especially for optical isolators. In this paper,ferrite ceramic target using cerium (Ce)-substituted YIG was made using ferric oxide (Fe2O3), cerium oxide (CeO2) and yttrium oxide (Y2O3) powders as raw material. Ce:YIG thin films were fabricated by radio frequency (RF) magnetron sputtering. The experimental result showed that the polycrystalline YIG was obtained after sintering at 1350℃ for 6h,and the polycrystalline Ce:YIG thin films were achieved annealing up to 700℃ in the air.

英文摘要:

Yttrium iron garnet (YIG) is widely used for microwave ferrite devices, especially for optical isolators. In this paper, ferrite ceramic target using cerium (Ce)-substituted YIG was made using ferric oxide (Fe203), cerium oxide (CeO2) and yttrium oxide (Y2O3) powders as raw material. Ce: YIG thin films were fabricated by radio frequency (RF) magnetron sputtering. The experimental result showed that the polycrystalline YIG was obtained after sintering at 1 350 ℃ for 6 h, and the polycrystalline Ce: YIG thin films were achieved annealing up to 700 ℃ in the air.

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