Yttrium iron garnet (YIG) is widely used for microwave ferrite devices,especially for optical isolators. In this paper,ferrite ceramic target using cerium (Ce)-substituted YIG was made using ferric oxide (Fe2O3), cerium oxide (CeO2) and yttrium oxide (Y2O3) powders as raw material. Ce:YIG thin films were fabricated by radio frequency (RF) magnetron sputtering. The experimental result showed that the polycrystalline YIG was obtained after sintering at 1350℃ for 6h,and the polycrystalline Ce:YIG thin films were achieved annealing up to 700℃ in the air.
Yttrium iron garnet (YIG) is widely used for microwave ferrite devices, especially for optical isolators. In this paper, ferrite ceramic target using cerium (Ce)-substituted YIG was made using ferric oxide (Fe203), cerium oxide (CeO2) and yttrium oxide (Y2O3) powders as raw material. Ce: YIG thin films were fabricated by radio frequency (RF) magnetron sputtering. The experimental result showed that the polycrystalline YIG was obtained after sintering at 1 350 ℃ for 6 h, and the polycrystalline Ce: YIG thin films were achieved annealing up to 700 ℃ in the air.