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Fabrication of nanoscale step height structure using atomic layer deposition combined with wet etchi
  • ISSN号：1000-9345
  • 期刊名称：Chinese Journal of Mechanical Engineering (english
  • 时间：2016
  • 页码：91-97
  • 相关项目：突破光学组件集成瓶颈的纳米表面形貌在线测量新方法研究
作者： Wei Ren|Qijing Lin|Yijun Zhang|Zhuangde Jiang|
同期刊论文项目
突破光学组件集成瓶颈的纳米表面形貌在线测量新方法研究
期刊论文 26 会议论文 11 专利 5
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