中文摘要：

利用直流电弧等离子体喷射法沉积装置在底径65 mm、高5 mm的Mo球面衬底上制备出厚度大于500μm金刚石膜。用千分尺测量膜径向厚度以判断膜厚均匀性,用SEM观察膜的表面形貌,用拉曼谱仪测量膜的表面纯度,通过分析电镜形貌和拉曼谱峰的分布特点来判断金刚石膜的质量均匀性。结果表明,在优化工艺条件下,直流电弧等离子体喷射法设备可以在球面Mo衬底上生长出厚度和质量都比较均匀的半透光的自支撑球面金刚石厚膜。

英文摘要：

A diamond film with more than 500 μm thickness is gown by using the technique of DC arc plasma jet on Mo spherical substrate of 65 mm in bottom diameter and 5 mm height.The diamond film radial thickness is measured by a micrometer,the surface morphology is detected by SEM,the surface purity is measured by Raman spectrometer and the Raman peak distribution is analyzed as well as the purity uniformity is determined by the skill of SEM morphology.The results show that in the optimization of conditions,the tran...