中文摘要：

文中设计了一种在精密加工操作中,对操作人员及外界非正常颤抖信号进行检测并自动补偿的微型操作仪。仪器结构精巧,具有可拆卸及更换的加工探头,方便不同精密加工的使用;采用激光干涉仪对精密加工位置信号进行检测,基于经典PID闭环控制和边缘检测原理,对干扰信号进行判断并做出相应补偿措施;采用压电陶瓷微电动机PM的逆向运动自动补偿颤抖产生的误差,从而保证精密加工的可靠性和精确度。实验表明,该微型仪器能自动补偿颤抖干扰信号,精度可达到1μm,对精密加工的精度提高及误差补偿研究有一定借鉴价值。

英文摘要：

A micro operation instrument which can detect the abnormal trembling signal of operators and outside world, and can compensate the signal automatically was designed in this paper.The structure of the instrument was ingenious with processing probe that can be removed and replaced.This instrument can be used in different precision machining with the laser interferometer adopted to detect the position signal of precision machining and its detection was based on the principle of classical PID closed-loop control and edge detection.h can detect the interference signal and thus make the corresponding compensation.The backward motion of the piezoelectric ceramic micro motor PM was used to compensate the error automatically produced by trembling which can en- sure the reliability and accuracy of processing machining.The experiments show that the interference signal can be compensate auto- matically by the micro instrument and the accuracy reaches 1,so it has certain reference value in the research of accuracy improve- ment anti error compensation.