中文摘要：

设计了一种在精密加工操作中对操作人员及外界非正常颤抖信号进行检测并自动补偿的微型操作仪。仪器结构精巧，具有可拆卸及更换的加工探头，可满足不同精密加工的使用需求。基于经典PID闭环控制和边缘检测原理，采用激光干涉仪对精密加工位置信号进行检测，对干扰信号进行判断并做出相应补偿措施；采用压电陶瓷微电动机PM的逆向运动自动补偿颤抖产生的误差，保证精密加工的可靠性和精确度。实验表明，该微型仪器能自动补偿颤抖干扰信号，精度可达到1μm，对精密加工的精度提高及误差补偿研究有一定借鉴价值。

英文摘要：

A micro operation instrument with the functions of detecting the abnormal trembling signal of operators and outside world, and compensating the signal automatically is designed. The structure of the instrument is ingenious with a removable and replaceable processing probe,and can be satisfied with different precision machining, t Basing on the principle of classical PID closed-loop control and edge detection,the laser interferometer is adopted to detect the position signal of precision machining,and can detect the interference signal and thus make the corresponding compensation. The backward motion of the piezoelectric ceramic micro motor PM is used to compensate the error automatically produced by trembling which can ensure the reliability and accuracy of processing machining. The experiment results show that the interference signal can be automatically compensated with the accuracy 1μm by the micro instrument. Therefore, the research of accuracy improvement and error compensation has certain reference value.