中文摘要：

介绍了一种平面线圈型电磁驱动的MEMS微驱动器，基于分段磁路的网络方程法，针对微电磁驱动器所采用的平面线圈的结构特点，比较了考虑磁动势的分布效应和传统的集总处理两种方法所建立的平面线圈微驱动器的非线性磁路模型．实验结果表明考虑线圈绕组半径不同而产生的分布效应可以为平面线圈型微驱动器建立可靠的模型，便于定量分析微驱动器结构物理参数对于磁通分布和电磁力的影响，从而为进一步优化设计该微电磁驱动器提供了理论分析依据．

英文摘要：

A planar type MEMS electromagnetic actuator is described. Based on the network sloving method of magnetic circuits, considering the structural characteristic of planar coil, a comparison is made between two ways for nonlinear modeling of the device： distributed mechod and lumped method. The experimental results indicate that it is much more reliable to build a model considering the distributing effects caused by different radius of every coil turn. And this model helps to quantify the structure relying flux and magnetic force. Thus a theoretical method of further optimizing the device is provided.