中文摘要：

采用微机电系统加工技术制作出一种结构新颖的微型电磁式振动能量采集器,它可以把周围环境中的振动能转换为电能。整个结构主要由圆形SmCo28永磁体、铜平面弹簧和双层线圈构成。采用UV-LIGA技术和电镀技术制作铜平面弹簧和双层线圈,并与永磁体一起组装成试验样机,其体积大约为200mm3。Ansys有限元仿真结果表明共振结构的一阶固有频率为129.3Hz。对组装好的电磁式振动能量采集器试验样机的初步测试表明：在加速度为3g（g=9.8m/s2）的外界输入冲击下,负载两端的交流电压峰峰值为32.5mV。

英文摘要：

A novel micro electromagnetic vibration energy harvester is presented, which can convert vibration energy into electrical energy according to electromagnetic induction law. It consists of a permanent magnet of SmCo28, a copper planar spring and a two - layer coil. The copper planar spring and two - layer coil are fabricated using UV - LIGA and electroplating technology. The size of the micro vibration energy harvester is about 200mm^3 in volume. The result of finite element simulations is that the natural frequency of the resonant structure is 129.3Hz. Initial measurement shows that the peak -to -peak voltage value of the load resistance is 32.5mV when the vibration energy harvester is under a shock with an acceleration of about 3g （g= 9.8m/s^2）.