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Microstructural evolution upon annealing in Ar-implanted Si
  • ISSN号：0169-4332
  • 期刊名称：Applied Surface Science
  • 时间：0
  • 页码：9183-9187
  • 相关项目：GaN异质结中快重离子引起电离损伤的研究
作者： Li, B.S.1|Zhang, C.H.1|Yang, Y.T.1|Zhang, L.Q.1|Xu, C.L.1|
同期刊论文项目
GaN异质结中快重离子引起电离损伤的研究
期刊论文 24
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