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Stability, nonlinearity and reliability of electrostatically actuated MEMS devices
  • ISSN号：1424-8220
  • 期刊名称：Sensors
  • 时间：0
  • 页码：760-796
  • 语言：英文
  • 相关项目：参数激励静电驱动微机电系统(MEMS)的非线性振动与控制
作者： 张文明, 孟光, 陈迪|
同期刊论文项目
参数激励静电驱动微机电系统(MEMS)的非线性振动与控制
期刊论文 28 会议论文 5 专利 1 著作 1
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