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中文摘要：
静电驱动微机电系统（MEMS）共振传感器因其结构简单、应用广泛等优点引起了研究人员广泛的关注，共振传感器件耦合系统在非线性静电力、压膜阻尼、参数激励下呈现出较复杂的非线性振动、不稳定性、分岔与混沌行为。提出参数激励作用下静电驱动微机电系统中梁式微结构共振传感器的动力学模型，采用多尺度方法对微系统的动力学方程进行摄动分析，探讨直流偏置电压、压膜阻尼和交流激励电压幅值对系统频率响应、共振频率的影响规律，结果表明：直流偏置电压和交流电压幅值都具有软化效应，且使共振频率漂移到较小的数值范围，压膜阻尼对共振频率的影响较小，但是增大压膜阻尼会使稳态振幅的峰值明显下降，为静电驱动微机电系统共振传感器的动力学分析与设计提供参考。
英文摘要：
Electrostatically actuated resonant MEMS （Micro-electro-mechanical systems） sensors have gotten significant attention due to their geometric simplicity and broad applicability. The coupled resonant MEMS sensors display complex nonlinear vibration, instability, bifurcation and chaos behaviors under the effects of nonlinear electrostatic force, squeeze film damping and parametric actuations. A dynamic model of electrostatically actuated beam based MEMS resonant sensor under parametric excitation was presen- ted. The multi-scale method was used to carry out the perturbation analysis of microsystem. The effects of dc bias voltage, squeeze film damping and the amplitude of ac voltage on the resonant frequency and frequency response were discussed in detail. It indicates that the dc bias voltage and the amplitude of ac voltage show softening effect and shift the resonant frequency to a smaller range. The effect of squeeze film damping on the resonant frequency can be ignored, but the stable vibration amplitude will decline ob- vious with the increase of squeeze film damping. The results can be used for dynamics analysis and design of resonant MEMS sensors.
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