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Highly parallel rigorous simulations of phase-shift masks with a generalized eigen-oscillation spect
  • ISSN号：1537-1646
  • 期刊名称：Journal of Micro-Nanolithography Mems and Moems
  • 时间：0
  • 页码：1-13
  • 语言：英文
  • 相关项目：工艺偏差下的大规模互连线电路与非线性电路分析方法研究
作者： Zong, Ke|Zeng, Xuan|Cai, Wei|Ji, Xia|
同期刊论文项目
工艺偏差下的大规模互连线电路与非线性电路分析方法研究
期刊论文 21 会议论文 13 获奖 14 专利 3
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