中文摘要：

为了提高固贴式薄膜体声波谐振器（SMR）的电学和声学品质,实现四面体非晶碳（ta-C）在体声波器件领域的新应用,建立了以ta-C为布拉格反射栅高声阻抗材料的SMR模型,利用MathCAD仿真研究布拉格反射栅层数对该SMR的谐振特性的影响以及ta-C中sp3杂化含量和高/低声阻抗层厚度偏差对SMR的品质因子（Q值）的影响。结果表明层数的增加提高了SMR的品质;ta-C薄膜sp3杂化含量越高,达到饱和Q值所需层数越少,当含量为80%时,至少需要6层（3对）布拉格反射层使SMR达到优异Q值;距离压电堆越近的高/低声阻抗层,其厚度偏差对Q值的影响越大,从而实现了高频率（8GHz）低损耗的SMR的设计。

英文摘要：

To improve the electricity and acoustic quality of solidly mounted resonator（SMR）,realize the new application of tetrahedral amorphous carbon（ta-C） in the field of bulk acoustic wave device,a SMR was designed with ta-C as the high acoustic impedance Bragg reflector,which to simulate the effect of the Bragg reflector to the properties of SMR,as well as the influence of the sp3 fraction in ta-C and the error of thickness of high/low acoustic impedance layers on quality factor（Q） by MathCAD.The simulation results showed that the quality of SMR was improved with the increase of Bragg reflectors.With higher sp3 fraction,saturated Q factor can be reached with fewer layers,and there should be only six layers（three pairs） in order to get an excellent Q factor when the sp3 fraction in ta-C was 80%.The thickness error of high/low acoustic impedance layers closer to the piezoelectric stack had greater effect to Q factor.So the design of SMR with high frequency（8GHz） and low loss has been realized.